Effects of humidity and temperature on quality factor of micro-beam resonators in atmospheric pressure and gas rarefaction

Authors

  • Nguyen Chi Cuong*
  • Trinh Xuan Thang
  • Lam Minh Thinh
  • Vuong Dinh Duy Phuc
  • Phan Minh Truong
  • Truong Huu Ly
  • Ngo Vo Ke Thanh
  • Le Quoc Cuong

Abstract

At atmospheric pressure (p=101325 Pa), the effects of humidity and temperature on moist air become important when discussing the quality factor of micro-cantilever and micro-bridge resonators. The squeeze film damping (SFD) problem, the dominant damping source for micro-beam resonators, is modelled using the modified molecular gas lubrication (MMGL) equation with finite element modelling (FEM) in the eigenvalue problem. The MMGL equation is modified with the effective viscosity of moist air (µeff) to account for the effects of humidity and temperature. Other damping sources, such as thermoelastic damping (TED) and the support loss of micro-beam resonators, are also calculated. The quality factor of micro-beam resonators is then discussed over a wide range of temperatures and relative humidity levels at atmospheric pressure and gas rarefaction. The results show that the quality factor of micro-cantilever and micro-bridge resonators increases as both humidity and temperature rise in atmospheric pressure and gas rarefaction. Furthermore, the quality factor of a micro-bridge resonator with changes in humidity and temperature is significantly higher than that of a micro-cantilever resonator in atmospheric pressure and gas rarefaction.

Keywords:

micro-beam resonators, quality factor, relative humidity, squeeze film damping, temperature

DOI:

https://doi.org/10.31276/VJSTE.66(1).03-09

Classification number

2.1, 2.3

Author Biographies

Nguyen Chi Cuong

Research Laboratories of Saigon High-Tech Park, Lot I3, N2 Street, Saigon High-Tech Park, Tan Phu Ward, District 9, Ho Chi Minh City, Vietnam

Trinh Xuan Thang

Research Laboratories of Saigon High-Tech Park, Lot I3, N2 Street, Saigon High-Tech Park, Tan Phu Ward, District 9, Ho Chi Minh City, Vietnam

Lam Minh Thinh

Research Laboratories of Saigon High-Tech Park, Lot I3, N2 Street, Saigon High-Tech Park, Tan Phu Ward, District 9, Ho Chi Minh City, Vietnam

Vuong Dinh Duy Phuc

Research Laboratories of Saigon High-Tech Park, Lot I3, N2 Street, Saigon High-Tech Park, Tan Phu Ward, District 9, Ho Chi Minh City, Vietnam

Phan Minh Truong

Institute for Computational Science and Technology, SBI Building, Quang Trung Software City, Tan Chanh Hiep Ward, District 12, Ho Chi Minh City, Vietnam

Truong Huu Ly

Research Laboratories of Saigon High-Tech Park, Lot I3, N2 Street, Saigon High-Tech Park, Tan Phu Ward, District 9, Ho Chi Minh City, Vietnam

Ngo Vo Ke Thanh

Research Laboratories of Saigon High-Tech Park, Lot I3, N2 Street, Saigon High-Tech Park, Tan Phu Ward, District 9, Ho Chi Minh City, Vietnam

Le Quoc Cuong

Research Laboratories of Saigon High-Tech Park, Lot I3, N2 Street, Saigon High-Tech Park, Tan Phu Ward, District 9, Ho Chi Minh City, Vietnam

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Published

2024-03-15

Received 10 March 2023; revised 1 June 2023; accepted 18 July 2023

How to Cite

Nguyen Chi Cuong, Trinh Xuan Thang, Lam Minh Thinh, Vuong Dinh Duy Phuc, Phan Minh Truong, Truong Huu Ly, Ngo Vo Ke Thanh, & Le Quoc Cuong. (2024). Effects of humidity and temperature on quality factor of micro-beam resonators in atmospheric pressure and gas rarefaction. Vietnam Journal of Science, Technology and Engineering, 66(1), 3-9. https://doi.org/10.31276/VJSTE.66(1).03-09

Issue

Section

Physical Sciences