NGUYEN CHI CUONG; TRINH XUAN THANG; LAM MINH THINH; VUONG DINH DUY PHUC; PHAN MINH TRUONG; TRUONG HUU LY; NGO VO KE THANH; LE QUOC CUONG. Effects of humidity and temperature on quality factor of micro-beam resonators in atmospheric pressure and gas rarefaction. Vietnam Journal of Science, Technology and Engineering, [S. l.], v. 66, n. 1, p. 3-9, 2024. DOI: 10.31276/VJSTE.66(1).03-09. Disponivel em: https://vietnamscience.vjst.vn/index.php/vjste/article/view/1179. Acesso em: 15 jul. 2026.