Nguyen Chi Cuong, Trinh Xuan Thang, Lam Minh Thinh, Vuong Dinh Duy Phuc, Phan Minh Truong, Truong Huu Ly, Ngo Vo Ke Thanh and Le Quoc Cuong 2024. Effects of humidity and temperature on quality factor of micro-beam resonators in atmospheric pressure and gas rarefaction. Vietnam Journal of Science, Technology and Engineering. 66, 1 (Mar. 2024), 3-9. DOI:https://doi.org/10.31276/VJSTE.66(1).03-09.